可測光斑尺寸

Si detector:   5 µm to 4 mm,   to 2 µm in Knife-Edge mode

InGaAs   detector: 10 µm to 3 mm, to 2 µm in   Knife-Edge mode

InGaAs   (extended) detector: 10 µm to 2 mm, to 2 µm in   Knife-Edge mode

平面間距 (4XY)

100 µm: -100, 0,   +100, +400 µm

250

平面間距 (3XYKE)

50 µm: -50, 0,   +50, 0 µm

100

光斑束腰直徑測量

Second   moment (4s) diameter to ISO 11146; Fitted Gaussian & TopHat

1/e

光斑束腰位置測量

± 20 µm best in X,   Y, and Z — contact DataRay for recommendation

可測光源

CW; Pulsed   lasers, F µm = [500/(PRR in kHz)]

分辨率/精度

0.1 µm or 0.05%   of scan range

M2 測量

1 to >   20, ± 5%

發(fā)散角/準(zhǔn)直,指向性

1 mrad best   — contact DataRay for recommendation

最da功率 & 輻照度

1 W Total   & 0.5 mW/µm2

增益范圍

1,000:1   Switched 4,096:1 ADC range

顯示圖形

X-Y-Z   Position & Profiles, Zoom x1 to x16

更新速率

~5 Hz

XY輪廓和質(zhì)心

Beam Wander   display and logging

電腦硬件要求

Windows, 2   GB RAM, USB 2.0/3.0 port